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New Industry Creation Hatchery Center (NICHe)
Tohoku University
| The researches at Fluctuation Free Facility are aiming to realize "Ultra-Large-Scale-Integration (ULSI), which features flexibility and high intelligence." The area of the research covers all silicon technologies. Currently, the focused issues are the development of infrastructure for ultra-short TAT semiconductor manufacturing, the development of manufacturing equipment using plasma, research on process technology, development of ultra-high speed device, electronic circuit for information processing with intelligence, and research on algorithms reducing computing costs. |
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【The earthquake and tsunami in Japan】 June 11 updated We have deeply appreciated many greetings of thoughtfulness for the earthquake and tsunami in Japan on March 11. Our laboratory, including students, researchers and staff, are fortunately
all safe Although it took time, however, infrastructure such as electricity, water, and gases have been supplied and restored succeedingly. The body of Fluctuation Free Facility for New Information Industry was
undamaged. It is not perfect restoration because we need time to get some parts, however,
we have operated our cleanroom as almost usual and carried out experiments
since May 19. |