Fluctuation Free Facility (FFF),
New Industry Creation Hatchery Center (NICHe), Tohoku University
 


[ Japanese | English ]


 Contents

  ■Top
  ■AboutFFF
  ■Map
  ■Information
  ■Papers

  ■Research

  ■Link

  ■ContactUs







 Fluctuation Free Facility (FFF)
New Industry Creation Hatchery Center (NICHe)
Tohoku University




 The researches at Fluctuation Free Facility are aiming to realize "Ultra-Large-Scale-Integration (ULSI), which features flexibility and high intelligence." The area of the research covers all silicon technologies. Currently, the focused issues are the development of infrastructure for ultra-short TAT semiconductor manufacturing, the development of manufacturing equipment using plasma, research on process technology, development of ultra-high speed device, electronic circuit for information processing with intelligence, and research on algorithms reducing computing costs.