Fluctuation Free Facility (FFF),
New Industry Creation Hatchery Center (NICHe), Tohoku University
 


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 Fluctuation Free Facility (FFF)
New Industry Creation Hatchery Center (NICHe)
Tohoku University




 The researches at Fluctuation Free Facility are aiming to realize "Ultra-Large-Scale-Integration (ULSI), which features flexibility and high intelligence." The area of the research covers all silicon technologies. Currently, the focused issues are the development of infrastructure for ultra-short TAT semiconductor manufacturing, the development of manufacturing equipment using plasma, research on process technology, development of ultra-high speed device, electronic circuit for information processing with intelligence, and research on algorithms reducing computing costs.

                                  

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